IMECH-IR  > 非线性力学国家重点实验室
Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure
Zhang Y(张吟); Zhao YP(赵亚溥); Cheng ZH
Source PublicationJOURNAL OF PHYSICS D-APPLIED PHYSICS
2018-02-14
Volume51Issue:6Pages:65305
ISSN0022-3727
AbstractThe inverse problem of determining three parameters: the film thickness, the film and substrate Young's moduli of a film/substrate bilayer by indentation, is formulated and solved. The physical mechanism for the solvability of the inverse problem is that these three parameters have different impacts at different indentation depth. Their impacts are systematically studied, which also provides a different approach of finding the three parameters or refining their range. Compared with various atomic force microscopy based techniques of detecting subsurface structures, which have to deal with an extremely difficult or even an insurmountable inverse problem with the integral equation of dynamics, the inverse problem here formulated by statics is much more straightforward and simpler. Formulating and solving such an inverse problem can be of some help to the applications such as characterizing subsurface structures, the out-of-plane properties of two-dimensional (2D) materials and various bilayer structures.
Keywordindentation inverse problem bilayer structure subsurface characterization
DOI10.1088/1361-6463/aaa55d
URL查看原文
Indexed BySCI ; EI
Language英语
WOS IDWOS:000423306600001
WOS KeywordATOMIC-FORCE MICROSCOPY ; ELASTIC-MODULUS ; THIN-FILM ; MECHANICAL-PROPERTIES ; ACOUSTIC MICROSCOPY ; CONTACT STIFFNESS ; NANOINDENTATION ; SUBSTRATE ; HARDNESS ; HETEROSTRUCTURES
WOS Research AreaPhysics, Applied
WOS SubjectPhysics
Funding OrganizationNational Natural Science Foundation of China (NSFC) [11372321, 11772335, 21203038] ; Ministry of Science and Technology (MOST) of China [2016YFA0200700]
Classification二类
Ranking1
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Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/78518
Collection非线性力学国家重点实验室
Affiliation1.Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China
2.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China
3.Renmin Univ China, Dept Phys, Beijing 100872, Peoples R China
4.Renmin Univ China, Beijing Key Lab Optoelect Funct Mat & Micronano D, Beijing 100872, Peoples R China
Recommended Citation
GB/T 7714
Zhang Y,Zhao YP,Cheng ZH. Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2018,51(6):65305.
APA 张吟,赵亚溥,&Cheng ZH.(2018).Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure.JOURNAL OF PHYSICS D-APPLIED PHYSICS,51(6),65305.
MLA 张吟,et al."Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure".JOURNAL OF PHYSICS D-APPLIED PHYSICS 51.6(2018):65305.
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