IMECH-IR  > 先进制造工艺力学实验室
一种基于反应溅射迟滞效应的TiAlSiN涂层制备方法
夏原; 高方圆; 李光
2019-02-22
Rights Holder中国科学院力学研究所
Application Date2017-05-11
Patent NumberZL201710328563.7
Language中文
Country中国
Agency北京和信华成知识产权代理事务所
Document Type专利
Identifierhttp://dspace.imech.ac.cn/handle/311007/80897
Collection先进制造工艺力学实验室
Affiliation中国科学院力学研究所
Recommended Citation
GB/T 7714
夏原,高方圆,李光. 一种基于反应溅射迟滞效应的TiAlSiN涂层制备方法. ZL201710328563.7[P]. 2019-02-22.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[夏原]'s Articles
[高方圆]'s Articles
[李光]'s Articles
Baidu academic
Similar articles in Baidu academic
[夏原]'s Articles
[高方圆]'s Articles
[李光]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[夏原]'s Articles
[高方圆]'s Articles
[李光]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.