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Simulations of dislocation density in silicon carbide crystals grown by the PVT-method
Chen QS(陈启生)1,2,3; Zhu P(朱鹏)1,3; He M(何蒙)1,3
通讯作者Chen, Qi-Sheng(qschen@imech.ac.cn)
发表期刊JOURNAL OF CRYSTAL GROWTH
2020-02-01
卷号531页码:6
ISSN0022-0248
摘要The Alexander-Haasen (AH) model has been applied to analyze the plastic deformation and dislocation generation during the crystal growth process of 4H-SiC (silicon carbide). Plastic parameters are obtained by fitting the predicted curves to the experimental data on the plastic deformation of alpha-SiC crystals under uniaxial compression. The relationship between the activity energy (Q) and stress exponent (n) is considered when using the AH model. This relationship explicitly represents two deformation mechanisms around the critical temperature. The ratio of the activity energy and stress exponent, Q/n, equals 0.3 eV when the temperature is below the transition temperature, and 1.3 eV when the temperature is above the transition temperature. Then, the model is used to predict the dislocation density and thermal stresses in the crystals. The largest dislocation density is found to occur near the graphite/SiC interface, and the dislocation density gradually decreases with the thickness of the ingot.
关键词Computer simulation Defects Heat transfer Stresses Growth from vapor Semiconducting silicon compounds
DOI10.1016/j.jcrysgro.2019.125380
收录类别SCI ; EI
语种英语
WOS记录号WOS:000504205900044
关键词[WOS]SIC SINGLE-CRYSTALS ; PLASTIC BEHAVIOR ; ACTIVATION PARAMETERS ; NUMERICAL-SIMULATION ; SUBLIMATION GROWTH ; DYNAMICS ; GLIDE
WOS研究方向Crystallography ; Materials Science ; Physics
WOS类目Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
资助项目National Natural Science Foundation of China[11772344] ; National Natural Science Foundation of China[11532015]
项目资助者National Natural Science Foundation of China
论文分区Q3
力学所作者排名1
RpAuthorChen, Qi-Sheng
引用统计
被引频次:8[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://dspace.imech.ac.cn/handle/311007/81253
专题微重力重点实验室
作者单位1.Chinese Acad Sci, Inst Mech, Key Lab Micrograv, Beijing 100190, Peoples R China;
2.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China;
3.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100190, Peoples R China
推荐引用方式
GB/T 7714
Chen QS,Zhu P,He M. Simulations of dislocation density in silicon carbide crystals grown by the PVT-method[J]. JOURNAL OF CRYSTAL GROWTH,2020,531:6.
APA 陈启生,朱鹏,&何蒙.(2020).Simulations of dislocation density in silicon carbide crystals grown by the PVT-method.JOURNAL OF CRYSTAL GROWTH,531,6.
MLA 陈启生,et al."Simulations of dislocation density in silicon carbide crystals grown by the PVT-method".JOURNAL OF CRYSTAL GROWTH 531(2020):6.
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