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A fixed arc length direct current plasma torch for reduced pressure deposition of thin films 会议论文
10th Asia-Pacific Conference on Plasma Science and Technology, Jeju, Korea, 2010-07-04~2010-07-08
Authors:  Huang HJ(黄河激);  Pan WX(潘文霞);  Fu ZQ(付志强);  Wu CK(吴承康)
Adobe PDF(14Kb)  |  Favorite  |  View/Download:982/266  |  Submit date:2011/01/12
Fixed-length Dc Plasma Reduced Pressure Deposition Thermal Plasma