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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [2]
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张泰华 [1]
沈青 [1]
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2006 [1]
2003 [1]
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力学进展 [1]
微纳电子技术 [1]
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Indexed By：国内刊物
Document Type：期刊论文
Community：力学所知识产出(1956-2008)
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MEMS稀薄气体内部流动模拟中的信息保存(IP)法
期刊论文
力学进展, 2006, 卷号: 36, 期号: 1, 页码: 142-150
Authors:
沈青
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View/Download：578/168
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Submit date：2007/06/15
纳米硬度计在MEMS力学检测中的应用
期刊论文
微纳电子技术, 2003, 卷号: 40, 期号: 7/8, 页码: 212-214
Authors:
张泰华
Adobe PDF(111Kb)
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View/Download：831/386
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Submit date：2007/06/15
