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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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水动力学与海洋工程重... [1]
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宋宏伟 [1]
纪科星 [1]
范学军 [1]
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2010 [1]
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力学与实践 [1]
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Indexed By：CSCD
Funding Organization：总装备部预研基金项目
Document Type：期刊论文
Community：水动力学与海洋工程重点实验室(2009-2011)
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高温MEMS剪应力传感器残余应力分析
期刊论文
力学与实践, 2010, 卷号: 32, 期号: 1, 页码: 60-63
Authors:
纪科星
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宋宏伟
;
范学军
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Submit date：2010/05/03
Mems
剪应力传感器
残余应力
有限元
