IMECH-IR

Browse/Search Results:  1-1 of 1 Help

Filters                
Selected(0)Clear Items/Page:    Sort:
Two-dimensional simulation of inductive plasma sources with self-consistent power deposition 期刊论文
IEEE Transactions on Plasma Science, 1995, 卷号: 23, 期号: 4, 页码: 558-562
Authors:  Li M;  Wu HM(吴汉明);  Chen YM
Adobe PDF(424Kb)  |  Favorite  |  View/Download:679/272  |  Submit date:2009/08/03
Electron-cyclotron Resonance  Energy-distributions  Frequency