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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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吴松 [1]
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舒勇华 [1]
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2013 [1]
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中国力学大会——20... [1]
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Source Publication：中国力学大会——2013论文摘要集
Creator：吴松
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Creator：舒勇华
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康铜薄膜热流传感器的电子束物理气相沉积
会议论文
中国力学大会——2013, 中国北京, 2013-08-19
Authors:
舒勇华
;
吴松
;
李进平
;
樊菁
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Submit date：2014/04/02
热流传感器
薄膜
康铜
热传感器
热电偶
热接点
重复性误差
驻点
敏感元件
高频响
空间分辨率
风洞试验
层厚度
激波风洞
整体式
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