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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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先进制造工艺力学实验... [1]
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高方圆 [1]
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2012 [1]
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中文 [1]
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高方圆.磁控溅射Ti... [1]
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夏原 [1]
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Source Publication：高方圆.磁控溅射TiAlSiN等离子体特性与成膜机理研究.[博士学位论文].中国科学院力学研究所.2012
Thesis Advisor：夏原
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磁控溅射TiAlSiN等离子体特性与成膜机理研究
学位论文
博士论文，北京: 中国科学院研究生院, 2012
Authors:
高方圆
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Submit date：2013/01/08
