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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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汤奇恒 [1]
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2007 [1]
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Source Publication：Materials Science In Semiconductor Processing
Community：力学所知识产出(1956-2008)
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Md Simulation Of Dislocation Mobility During Cutting With Diamond Tip On Silicon
期刊论文
Materials Science In Semiconductor Processing, 2007, 页码: 270-275
Authors:
Tang QH(汤奇恒)
;
Tang, QH (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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Submit date：2009/08/03
Molecular Dynamics Simulation
Atomic Force Microscopy
Silicon
Dislocation
Pin Tool
Atomic-force Microscopy
Molecular-dynamics Simulation
Phase-transformations
Shuffle Dislocations
Nano-indentation
Monocrystals
Surface
Si
Deformation
Fracture
