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Magnetic and Pressure Effects on E-H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma 期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2021, 卷号: 49, 期号: 9, 页码: 2806-2816
Authors:  Wang CS(王传胜);  Liu, Xuhui;  Geng, Jinyue;  Li F(李飞);  Lin X(林鑫);  Yu XL(余西龙)
Adobe PDF(3369Kb)  |  Favorite  |  View/Download：238/59  |  Submit date：2021/11/01
E-H mode transition  electron energy distribution function (EEDF)  helical antenna  magnetic  
E-H mode transitions and high-energy electron characteristics of helical antenna coupled plasma 期刊论文
Journal of Physics D: Applied Physics, 2021, 卷号: 54, 期号: 31, 页码: 315201
Authors:  Wang CS(王传胜);  Lin X(林鑫);  Li F(李飞);  Yu XL(余西龙)
Adobe PDF(993Kb)  |  Favorite  |  View/Download：296/47  |  Submit date：2021/06/21
helical antenna  magnetic  E-H mode transition  high-energy electrons  metastable