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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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朱清文 [1]
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Journal ar... [1]
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1986 [1]
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中文 [1]
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工业加热 [1]
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感应耦合射频等离子体(英)
期刊论文
工业加热, 1986, 期号: 4, 页码: 53-56
Authors:
朱清文
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Submit date：2009/08/03
感应耦合
射频等离子体
等离子炬
感应等离子体
耦合效率
维持功率
光谱化学
趋肤深度
大气压状态
