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Creator：赵亚溥
First author
Funding Organization：This work is supported by the National Natural Science Foundation of China (NSFC, Grant Nos. 10721202 and 10772180), Ministry of Science and Technology (MOST Grant No. 2010CB631004) and National Basic Research Program of China (973 Program, Grant No. 2007CB310500).
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A precise model for the shape of an adhered microcantilever
期刊论文
Sensors and Actuators A-Physical, 2011, 卷号: 171, 期号: 2, 页码: 381-390
Authors:
Zhang Y(张吟)
;
Zhao YP(赵亚溥)
;
Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
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Submit date：2012/04/01
Stiction
Microcantilever
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S-shape
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