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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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先进制造工艺力学实验... [1]
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夏原 [1]
李光 [1]
高方圆 [1]
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Patent [1]
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2019 [1]
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中文 [1]
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Creator：高方圆
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Date Issued：2019
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一种基于反应溅射迟滞效应的TiAlSiN涂层制备方法
专利
发明专利. 一种基于反应溅射迟滞效应的TiAlSiN涂层制备方法, 专利号: ZL201710328563.7, 申请日期: 2017-05-11,
Inventors:
夏原
;
高方圆
;
李光
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Submit date：2020/02/09
