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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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Hu YQ [1]
赵亚溥 [1]
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2013 [1]
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Creator：Hu YQ
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Date Issued：2013
Document Type：会议论文
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Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si
会议论文
13th International Conference on Fracture 2013, ICF 2013, Beijing, China, June 16, 2013 - June 21, 2013
Authors:
Hu YQ
;
Zhao YP(赵亚溥)
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Submit date：2018/11/08
Accelerometers
Aluminum
Glass
Nanostructures
Tensile strength
Anodic bonding
Bonding temperatures
Dendritic nanostructures
Intermediate layers
MEMS/NEMS
Micro accelerometers
Micro
scale structures
Quasi
static loading
