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Magnetic and Pressure Effects on E-H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma 期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2021, 卷号: 49, 期号: 9, 页码: 2806-2816
Authors:  Wang CS(王传胜);  Liu, Xuhui;  Geng, Jinyue;  Li F(李飞);  Lin X(林鑫);  Yu XL(余西龙)
Adobe PDF(3369Kb)  |  Favorite  |  View/Download:236/59  |  Submit date:2021/11/01
E-H mode transition  electron energy distribution function (EEDF)  helical antenna  magnetic