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Stiction of flexural MEMS structures 会议论文
3rd International Conference on Digital Manufacturing and Automation, ICDMA 2012, Guangxi, China, AUG 01-02, 2012
Authors:  Liu Y;  Zhang Y(张吟)
View  |  Adobe PDF(307Kb)  |  Favorite  |  View/Download：725/231  |  Submit date：2013/02/26
Adhesion  Boundary Conditions  Composite Micromechanics  Manufacture  Stiction  Variational Techniques  Beam Bending  Beam Deflection  Beam Length  Constraint Conditions  Contact Areas  Contact Separation  Elastic Energy  External Loads  Matching Condition  Mems-structure  Micro-cantilevers  Microcantilever Beams  Principle Of Virtual Work  Rayleigh-ritz Methods  s Shape  S-shaped  Significant Impacts  Variational Methods  
Eigenfrequency shift of micro-sensor with the concentrated mass and spring 会议论文
2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007, Harbin, China, August 5, 2007 - August 8, 2007
Authors:  Liu Y;  Zhang Y(张吟)
View  |  Adobe PDF(214Kb)  |  Favorite  |  View/Download：184/80  |  Submit date：2017/06/01
Concentrated Mass  Eigenfrequency  Finite Mode Transform Method (Fmtm)  
Effect of compliant interface on the curvature and stress of micron-size film-substrate composite structure 会议论文
2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006, Kunming, China, December 17, 2006 - December 20, 2006
Authors:  Liu Y;  Zhang Y(张吟)
View  |  Adobe PDF(4554Kb)  |  Favorite  |  View/Download：175/78  |  Submit date：2017/06/01
(ABiotic And Biotic) Stress  Curvature (Sori)  Error Sources  General (Co)  Interface Layers  Interfacial Slips  International Conferences  Micron Sizes  Stoney's Formula  Stress States  Stress Transfer