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Mass and Force Sensing of an Adsorbate on a Beam Resonator Sensor 期刊论文
SENSORS, 2015, 卷号: 15, 期号: 7, 页码: 14871-14886
Authors:  Zhang Y(张吟);  Zhao YP(赵亚溥);  Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100190, Peoples R China.
View  |  Adobe PDF(1495Kb)  |  Favorite  |  View/Download:215/80  |  Submit date:2016/01/08
Mechanical Resonator Sensor  Resonant Frequency  Inverse Problem  Beam  
Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam 期刊论文
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 卷号: 21, 期号: 4, 页码: 919-929
Authors:  Zhang Y(张吟);  Zhao YP(赵亚溥);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
View  |  Adobe PDF(568Kb)  |  Favorite  |  View/Download:573/217  |  Submit date:2015/04/28