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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
Creator
刘澂 [1]
张大成 [1]
赵亚溥 [1]
钱劲 [1]
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Journal ar... [1]
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2001 [1]
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中文 [1]
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机械强度 [1]
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CSCD [1]
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Date Issued：2001
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微电子机械系统中的残余应力问题
期刊论文
机械强度, 2001, 卷号: 23, 期号: 4, 页码: 393
Authors:
钱劲
;
刘澂
;
张大成
;
赵亚溥
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Submit date：2010/05/03
微电子机械系统
残余应力
薄膜
屈曲
粘附
响应频率
