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宽域飞行工程科学与应... [1]
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Bilek, Mar... [1]
Gu, Jiabin [1]
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Li, Liuhe [1]
许亿 [1]
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Date Issued：2022
Funding Project：[2017-VII-0012-0108]
Community：宽域飞行工程科学与应用中心
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Application of positive pulse to extract ions from HiPIMS ionization region
期刊论文
VACUUM, 2022, 卷号: 204, 页码: 11
Authors:
Li, Liuhe
;
Gu, Jiabin
;
Xu Y(许亿)
;
Han, Mingyue
;
Bilek, MarcelaMilenaMarie
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Submit date：2022/12/20
High power impulse magnetron sputtering
(HiPIMS)
Ions extraction method
PIC-MCC simulation
Microscopic mechanism of ions extraction
