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宽域飞行工程科学与应... [2]
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HiPIMS 金属/气体离子比的调控及其对TiN涂层性能的影响
学位论文
硕士论文，北京: 中国科学院大学, 2024
Authors:
曾明亮
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View/Download：18/4
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Submit date：2024/06/03
高功率脉冲磁控溅射
TiN
等离子体特性
离子辐照
残余应力
Effect of bias voltage on the erosion performance of TiAlSiN coatings on TC6 substrate by high power impulse magnetron sputtering
期刊论文
SURFACE & COATINGS TECHNOLOGY, 2024, 卷号: 477, 页码: 20
Authors:
Li, Hua
;
Li, Liuhe
;
Wang, Xiaoting
;
Li GD(李国栋)
;
Li, Duoduo
;
Luo, Yang
;
Tang, Ling
;
Han, Mingyue
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View/Download：44/0
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Submit date：2024/02/26
Erosion
TiAlSiN
Bias voltage
HiPIMS
Failure mechanism
