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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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Funding Organization：Chinese Academy of Sciences(KJCX2-EW-L03)
Author：赵亚溥
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Flexural contact in MEMS stiction
期刊论文
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2012, 卷号: 49, 期号: 17, 页码: 2203-2214
Authors:
Zhang, Yin
;
Zhao, Ya-pu
;
Zhang, Y
;
Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China.
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Submit date：2013/01/18
Stiction
Contact Mechanics
Mems
Adhesion
Arc-shape
S-shape
