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Squeeze-film Effects in MEMS Devices with Perforated Plates for Small Amplitude Vibration 期刊论文
Microsystem Technologies, 2007, 卷号: 13, 期号: 7, 页码: 625-633
Authors:  Feng C(冯闯);  Zhao YP(赵亚溥);  Liu DQ(刘冬青)
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