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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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Indexed By：SCI
Creator：段俐
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Creator：马隆飞
Funding Organization：Strategic Priority Research Program of the Chinese Academy of Sciences [XDB23030100]
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Study of electron-extraction characteristics of an inductively coupled radio-frequency plasma neutralizer
期刊论文
PLASMA SCIENCE & TECHNOLOGY, 2018, 卷号: 20, 期号: 2, 页码: UNSP 025403
Authors:
He JW(贺建武)
;
Ma LF(马隆飞)
;
Xue SW(薛森文)
;
Zhang C(章楚)
;
Duan L(段俐)
;
Kang Q(康琦)
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Submit date：2018/10/30
electron source
plasma cathode
RF neutralizer
RF plasma
anode spot
