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Plasma characteristics and dynamics in a high power pulsed magnetron sputtering discharge 期刊论文
中国科学院大学学报, 2015, 卷号: 32, 期号: 2, 页码: 145-154
Authors:  Xia Y(夏原);  Gao FY(高方圆);  Li G(李光)
View  |  Adobe PDF(1949Kb)  |  Favorite  |  View/Download:320/84  |  Submit date:2015/12/25
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