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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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刘力锋 [1]
刘志凯 [1]
张富强 [1]
李艳丽 [1]
杨少延 [1]
陈晨龙 [1]
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Journal ar... [1]
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2004 [1]
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中文 [1]
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半导体学报 [1]
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国家自然科学基金 (... [1]
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Source Publication：半导体学报
Creator：刘志凯
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Creator：杨少延
Funding Organization：国家自然科学基金 (批准号 :60 1760 0 1和 60 3 90 0 72 )
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低能离子束方法制备重掺杂Fe的Si∶Fe固溶体
期刊论文
半导体学报, 2004, 卷号: 25, 期号: 8, 页码: 967-971
Authors:
刘力锋
;
陈诺夫
;
张富强
;
陈晨龙
;
李艳丽
;
杨少延
;
刘志凯
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Submit date：2010/05/03
硅
铁
低能离子束
重掺杂
