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GAS actuated micro-jet pump for micro-fluidic systems 会议论文
9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005, Boston, MA, United states, October 9, 2005 - October 13, 2005
Authors:  Li XH;  Yu XM;  Cui HH(崔海航);  Li ZH(李战华);  Zhang DC
View  |  Adobe PDF(3783Kb)  |  Favorite  |  View/Download:139/40  |  Submit date:2017/06/01
Air Bubbles  Etching Step  Micro-jet  Pump Chambers  Solid Wall  Vacuum Suction