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电弧离子镀中脉冲偏压对TiN,CrN薄膜性能的影响 学位论文
硕士论文,北京: 中国科学院研究生院, 1999
Authors:  李正阳
Adobe PDF(19949Kb)  |  Favorite  |  View/Download:589/3  |  Submit date:2009/04/13
脉冲  离子镀  薄膜  Pulse  Arc Deposition  Coating