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Two-dimensional fluid model simulation of bell jar top inductively coupled plasma 期刊论文
IEEE Transactions on Plasma Science, 1997, 卷号: 25, 期号: 1, 页码: 1-6
Authors:  Wu HM(吴汉明);  Yu BW;  Li M;  Yang Y;  Wu, HM (reprint author), CFD RES CORP,HUNTSVILLE,AL 35805, USA.
Adobe PDF(390Kb)  |  Favorite  |  View/Download：645/204  |  Submit date：2009/08/03
Inductively Coupled Plasma  Simulation  Discharge  Density  
Theoretical and experimental studies of the bell-jar-top inductively coupled plasma 期刊论文
IEEE Transactions on Plasma Science, 1997, 卷号: 25, 期号: 4, 页码: 776-785
Authors:  Wu HM(吴汉明);  Yu BW;  Krishnan A;  Li M;  Yang Y;  Yan JP;  Yuan DP;  Wu, HM (reprint author), CFD RES CORP, HUNTSVILLE, AL 35805 USA.
Adobe PDF(284Kb)  |  Favorite  |  View/Download：773/146  |  Submit date：2009/08/03
Experimental Diagnosis  Icp  2-d Modeling  Energy-distributions  Power Deposition  Langmuir Probe  Density  Discharges  Model