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Creator：Li RR
First author
Funding Organization：Ministry of Education of China
Funding Organization：National Natural Science Foundation of China (NSFC) - German Research Foundation (DFG) International Joint Research Programme
Document Type：期刊论文
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Molecular dynamics simulation of helium ion implantation into silicon and its migration
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 卷号: 456, 页码: 53-59
Authors:
Liu L
;
Xu ZW
;
Li RR
;
Zhu R
;
Xu J
;
Zhao JL
;
Wang C(王超)
;
Nordlund K
;
Fu X
;
Fang FZ
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Submit date：2019/10/14
Molecular dynamics simulation
Ion implantation
Helium
Si
Annealing
