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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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李帅辉 [1]
樊菁 [1]
舒勇华 [1]
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2007 [1]
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Indexed By：CPCI
Creator：李帅辉
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Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition
会议论文
the 8th Vacuum Metallurgy and Surface Engineering, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:
Li SH(李帅辉)
;
Shu YH(舒勇华)
;
Fan J(樊菁)
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Submit date：2016/06/28
Electron Beam Physical Vapor Deposition
Thin Film
Thickness And Species Distributions
Vapor Atom
Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation
Sphere Model
Evaporation
