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Md Simulation Of Dislocation Mobility During Cutting With Diamond Tip On Silicon 期刊论文
Materials Science In Semiconductor Processing, 2007, 页码: 270-275
Authors:  Tang QH(汤奇恒);  Tang, QH (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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Molecular Dynamics Simulation  Atomic Force Microscopy  Silicon  Dislocation  Pin Tool  Atomic-force Microscopy  Molecular-dynamics Simulation  Phase-transformations  Shuffle Dislocations  Nano-indentation  Monocrystals  Surface  Si  Deformation  Fracture