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Knowledge Management System of Institue of Mechanics, CAS
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Source Publication：NANOMATERIALS
Funding Organization：LiYing Program of the Institute of Mechanics, Chinese Academy of Sciences
Document Type：期刊论文
Community：非线性力学国家重点实验室
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Atomistic Insights on Surface Quality Control via Annealing Process in AlGaN Thin Film Growth
期刊论文
NANOMATERIALS, 2023, 卷号: 13, 期号: 8, 页码: 1382
Authors:
Peng Q(彭庆)
;
Ma ZW(马知未)
;
Cai, Shixian
;
Zhao S(赵帅)
;
Chen, Xiaojia
;
Cao, Qiang
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Submit date：2023/06/15
AlGaN thin film
molecular dynamics simulations
laser annealing
atomistic structure
