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Molecular dynamics simulation of deposition and growth of cu thin film on si substrate 会议论文
28th International Symposium on Rarefied Gas Dynamics (RGD), Zaragoza, SPAIN, JUL 09-13, 2012
Authors:  Zhang J(张俊);  Liu C(刘崇);  Shu YH(舒勇华);  Fan J(樊菁);  Zhang, J (reprint author), Chinese Acad Sci, State Key Lab High Temp Gas Dynam, Inst Mech, Beijing 100190, Peoples R China.
Adobe PDF(668Kb)  |  Favorite  |  View/Download：870/210  |  Submit date：2013/02/26
Thin Film Growth  Crystalline Structure And Orientation  Surface Roughness  Molecular Dynamics  Embedded-atom Method  Surfaces  Systems  Metals  
Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition 会议论文
the 8th Vacuum Metallurgy and Surface Engineering, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:  Li SH(李帅辉);  Shu YH(舒勇华);  Fan J(樊菁)
View  |  Adobe PDF(756Kb)  |  Favorite  |  View/Download：244/64  |  Submit date：2016/06/28
Electron Beam Physical Vapor Deposition  Thin Film  Thickness And Species Distributions  Vapor Atom  Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation  Sphere Model  Evaporation