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Language：英语
Funding Organization：National Natural Science Foundation of China [11002147, 10921062]
Document Type：期刊论文
Author：樊菁
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Community：高温气体动力学国家重点实验室
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Comparison of Cu thin films deposited on Si substrates with different surfaces and temperatures
期刊论文
APPLIED SURFACE SCIENCE, 2013, 卷号: 276, 页码: 417-423
Authors:
Zhang J(张俊)
;
Liu C(刘崇)
;
Fan J(樊菁)
;
Zhang, J (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
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Submit date：2013/06/27
Copper Thin Film
Deposition And Growth
Molecular Dynamics
Crystalline Structure And Orientation
