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李帅辉 [1]
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电子束物理气相沉积中的非平衡蒸气射流输运模型
会议论文
LHD2011夏季学术研讨会, 内蒙赤峰, 2011
Authors:
李帅辉
;
樊菁
;
舒勇华
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Submit date：2014/01/23
电子束物理气相沉积（ebpvd）
非平衡蒸气粒子输运模型
自由分子流假设失效判据
金属蒸气粒子vhs
模型参数
直接模拟monte
Carlo（dsmc）方法
大面积均匀薄膜制备工艺
