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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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朱清文 [1]
阎嘉坪 [1]
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Journal ar... [1]
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1988 [1]
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中文 [1]
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化工学报 [1]
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高频等离子体合成Si_3N_4超细粉料
期刊论文
化工学报, 1988, 卷号: 39, 期号: 6, 页码: 766-769
Authors:
朱清文
;
阎嘉坪
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Submit date：2009/08/03
超细粉料
参数选择
高频等离子体
Si_3n_4
数值计算
等离子体合成
磁泵
反应过程
等离子体负载
