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DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS 期刊论文
Acta Mechanica Sinica, 2004, 期号: 2, 页码: 152-158
Authors:  Wang XB(王小保);  Qian J(钱劲);  Zhang DC(张大成)
View  |  Adobe PDF(992Kb)  |  Favorite  |  View/Download：234/70  |  Submit date：2015/09/02
Micromachined Flowmeters  Bulk-micromachining  Piezoresistivity  Wheatstone Bridge  
大流量压阻式流量传感器的研制 期刊论文
微纳电子技术, 2003, 期号: Z1, 页码: 449-451
Authors:  王小保;  钱劲;  张大成
Adobe PDF(189Kb)  |  Favorite  |  View/Download：429/122  |  Submit date：2010/05/03
差压  流量传感器  微机械加工  压敏电阻