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Numerical-simulation of the flow, temperature, and concentration fields in a radiofrequency plasma cvd reactor 期刊论文
IEEE Transactions on Plasma Science, 1986, 卷号: 14, 期号: 4, 页码: 531-537
Authors:  Guoying Z;  Chingwen Z;  GUOYING, Z (reprint author), CHINESE ACAD SCI,INST MECH,BEIJING,PEOPLES R CHINA.
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