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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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Date Issued：2015
Funding Organization：National Natural Science Foundation of China (NSFC) [11023001, 11372321]
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Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam
期刊论文
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 卷号: 21, 期号: 4, 页码: 919-929
Authors:
Zhang Y(张吟)
;
Zhao YP(赵亚溥)
;
Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
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Submit date：2015/04/28
