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Zhao YP [1]
Zhou LJ [1]
赵亚溥 [1]
郭建刚 [1]
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2009 [1]
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Source Publication：Journal of Colloid and Interface Science
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Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force
期刊论文
Journal of Colloid and Interface Science, 2009, 卷号: 331, 期号: 2, 页码: 458-462
Authors:
Guo JG(郭建刚)
;
Zhou LJ
;
Zhao YP(赵亚溥)
;
Zhao YP
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Submit date：2009/08/03
Torsional Nems Actuator
Capillary Force
Instability
Bifurcation
Nanoscale Electrostatic Actuators
Van-der-waals
Casimir Force
Stability
Behavior
Plates
