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Stiction of flexural MEMS structures 会议论文
3rd International Conference on Digital Manufacturing and Automation, ICDMA 2012, Guangxi, China, AUG 01-02, 2012
Authors:  Liu Y;  Zhang Y(张吟)
View  |  Adobe PDF(307Kb)  |  Favorite  |  View/Download：726/231  |  Submit date：2013/02/26
Adhesion  Boundary Conditions  Composite Micromechanics  Manufacture  Stiction  Variational Techniques  Beam Bending  Beam Deflection  Beam Length  Constraint Conditions  Contact Areas  Contact Separation  Elastic Energy  External Loads  Matching Condition  Mems-structure  Micro-cantilevers  Microcantilever Beams  Principle Of Virtual Work  Rayleigh-ritz Methods  s Shape  S-shaped  Significant Impacts  Variational Methods  
A precise model for the shape of an adhered microcantilever 期刊论文
Sensors and Actuators A-Physical, 2011, 卷号: 171, 期号: 2, 页码: 381-390
Authors:  Zhang Y(张吟);  Zhao YP(赵亚溥);  Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
Adobe PDF(672Kb)  |  Favorite  |  View/Download：852/261  |  Submit date：2012/04/01
Stiction  Microcantilever  Adhesion  Arc-shape  S-shape  Finite Beam  Adhesion  Stiction  Mems  Contact  Force  Cantilevers  Foundation  Mechanics  Work