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Pyrex玻璃/铝多层阳极键合界面结构与力学分析 期刊论文
功能材料, 2008, 卷号: 39, 期号: 9, 页码: 1466-1469
Authors:  鲁晓莹;  刘翠荣;  孟庆森;  杨振宇;  赵亚溥
Adobe PDF(1098Kb)  |  Favorite  |  View/Download:659/158  |  Submit date:2010/05/03
阳极键合    Pyrex玻璃  力学特征  Mems