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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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微重力重点实验室 [1]
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孟永宏 [1]
靳刚 [1]
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2011 [1]
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Indexed By：SCI
Creator：reprint author
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Date Issued：2011
Author：靳刚
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Rotating compensator sampling for spectroscopic imaging ellipsometry
期刊论文
Thin Solid Films, 2011, 卷号: 519, 期号: 9, 页码: 2742-2745
Authors:
Meng YH(孟永宏)
;
Jin G(靳刚)
;
Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
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Submit date：2012/04/01
Rotating Compensator
Spectroscopic Imaging Ellipsometry
Spectroscopic Ellipsometry
Imaging Ellipsometry
Ellipsometry
Nanofilm Pattern
Microellipsometry
Design
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