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Adhesion-Induced Failure of the Slender MEMS Structures 会议论文
International Conference on Mechanical Design Manufacture and Automation Engineering, Phuket THAILAND, JAN 11-12 2014
Authors:  Liu Y;  Zhang Y(张吟);  liuyunkm@126.com;  zhangyin@lnm.imech.ac.cn
Favorite  |  View/Download:274/0  |  Submit date:2015/09/29
Adhesion  Stiction  S-shape  Arc-shape