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低能离子束方法制备重掺杂Fe的Si∶Fe固溶体 期刊论文
半导体学报, 2004, 卷号: 25, 期号: 8, 页码: 967-971
Authors:  刘力锋;  陈诺夫;  张富强;  陈晨龙;  李艳丽;  杨少延;  刘志凯
Adobe PDF(317Kb)  |  Favorite  |  View/Download:428/85  |  Submit date:2010/05/03
    低能离子束  重掺杂