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Technology of Silicon-Based MEMs 期刊论文
机械强度, 2001, 期号: 4, 页码: 523-526
Authors:  Hao YL(郝一龙);  Zhang LX(张立宪);  Li T(李婷)
Adobe PDF(392Kb)  |  Favorite  |  View/Download:613/352  |  Submit date:2007/06/15