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Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si 会议论文
13th International Conference on Fracture 2013, ICF 2013, Beijing, China, June 16, 2013 - June 21, 2013
作者:  Hu YQ;  Zhao YP(赵亚溥)
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Accelerometers  Aluminum  Glass  Nanostructures  Tensile strength  Anodic bonding  Bonding temperatures  Dendritic nanostructures  Intermediate layers  MEMS/NEMS  Micro accelerometers  Micro  scale structures  Quasi  static loading