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Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition 会议论文
the 8th Vacuum Metallurgy and Surface Engineering, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
作者:  Li SH(李帅辉);  Shu YH(舒勇华);  Fan J(樊菁)
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Electron Beam Physical Vapor Deposition  Thin Film  Thickness And Species Distributions  Vapor Atom  Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation  Sphere Model  Evaporation  
Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum 会议论文
8th Vacuum Metallurgy and Surface Engineering Conference, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
作者:  Li SH(李帅辉);  Shu YH(舒勇华);  Tang JR(唐锦荣);  Fan J(樊菁);  Li, SH (reprint author), Chinese Acad Sci, Inst Mech, Key Lab High Temp Gas Dynam, Beijing 100080, Peoples R China.
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Electron Beam Surface Treatment. Part I: Surface Hardening of AISI D3 Tool Steel 期刊论文
Vacuum, 2003, 卷号: 69, 期号: 4, 页码: 513-516
作者:  Song RG(宋仁国);  Zhang K(张坤);  Chen GN(陈光南);  Song, RG (reprint author), Natl Inst AIST, Res Inst Biol Resources, Toyohira Ku, 2-17-2-1 Tsukisamu Higashi, Sapporo, Hokkaido 0628517, Japan.
Adobe PDF(420Kb)  |  收藏  |  浏览/下载:783/212  |  提交时间:2007/06/15
Electron Beam Surface Treatment. Part II: Microstructure Evolution of Stainless Steel and Aluminum Alloy During Electron Beam Rapid Solidification 期刊论文
Vacuum, 2003, 卷号: 69, 期号: 4, 页码: 517-520
作者:  Song RG(宋仁国);  Zhang K(张坤);  Chen GN(陈光南);  Song, RG (reprint author), Natl Inst AIST, Res Inst Biol Resources, Toyohira Ku, 2-17-2-1 Tsukisamu Higashi, Sapporo, Hokkaido 0628517, Japan.
Adobe PDF(653Kb)  |  收藏  |  浏览/下载:738/163  |  提交时间:2007/06/15
Monte Carlo modeling of electron beam physical vapor deposition of yttrium 期刊论文
Journal of Vacuum Science & Technology A, 2000, 卷号: 18, 期号: 6, 页码: 2937-2945
作者:  Fan J(樊菁);  Boyd ID;  Shelton C
Adobe PDF(415Kb)  |  收藏  |  浏览/下载:629/242  |  提交时间:2013/04/23