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Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film 会议论文
14th International Conference on the Strength of Materials (ICSMA 14), Xian Jiaotong Univ, Xian, PEOPLES R CHINA, JUN 04-09, 2006
作者:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao YP
Adobe PDF(867Kb)  |  收藏  |  浏览/下载:709/190  |  提交时间:2009/07/23
Anodic Bonding  Dendritic Nanostructures  Aluminum Thin Film  Depletion Layer  Mems  Ion Drift Processes  Borosilicate Glass  Depletion  
Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film 会议论文
2005年纳米和表面科学与技术全国会议, 中国北京, 2005-09-01
作者:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希)
浏览  |  Adobe PDF(54Kb)  |  收藏  |  浏览/下载:190/50  |  提交时间:2015/09/10
Anodic Bonding  Dendritic Nanostructures  Depletion Layer  Dla